Christopher A. Bode, Ph.D. - Publications
Affiliations: | 2001 | University of Texas at Austin, Austin, Texas, U.S.A. |
Area:
Chemical EngineeringYear | Citation | Score | |||
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2007 | Bode CA, Wang J, He QP, Edgar TF. Run-to-run control and state estimation in high-mix semiconductor manufacturing Annual Reviews in Control. 31: 241-253. DOI: 10.1016/J.Arcontrol.2007.07.001 | 0.671 | |||
2005 | Wang J, He QP, Qin SJ, Bode CA, Purdy MA. Recursive least squares estimation for run-to-run control with metrology delay and its application to STI etch process Ieee Transactions On Semiconductor Manufacturing. 18: 309-318. DOI: 10.1109/Tsm.2005.846819 | 0.545 | |||
2004 | Bode CA, Sonderman TJ. Controlling the margins in 300 mm manufacturing Solid State Technology. 47: 49-52. | 0.638 | |||
2002 | Bode CA, Ko BS, Edgar TF. Run-to-run control and performance monitoring of overlay in semiconductor manufacturing Ifac Proceedings Volumes (Ifac-Papersonline). 15: 393-398. DOI: 10.1016/S0967-0661(03)00154-0 | 0.692 | |||
2002 | Bode C, Ko B, Edgar T. RUN-TO-RUN CONTROL AND PERFORMANCE MONITORING OF OVERLAY IN SEMICONDUCTOR MANUFACTURING Ifac Proceedings Volumes. 35: 393-398. DOI: 10.1016/S0967-0661(03)00154-0 | 0.665 | |||
2000 | Edgar TF, Butler SW, Campbell WJ, Pfeiffer C, Bode C, Hwang SB, Balakrishnan KS, Hahn J. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities Automatica. 36: 1567-1603. DOI: 10.1016/S0005-1098(00)00084-4 | 0.513 | |||
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