Melody P. Agustin, Ph.D.

Affiliations: 
2006 University of California, Santa Barbara, Santa Barbara, CA, United States 
Area:
Materials Science Engineering
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"Melody Agustin"

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Susanne Stemmer grad student 2006 UC Santa Barbara
 (Scanning transmission electron microscopy of novel gate stacks.)
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Publications

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Stemmer S, Agustin MP, Klenov DO. (2008) Scanning transmission electron microscopy studies of interface stability and point defects in gate stacks with high-k dielectrics Ecs Transactions. 16: 177-183
Agustin MP, Alshareef H, Quevedo-Lopez MA, et al. (2006) Influence of AIN layers on the interface stability of HfO 2 gate dielectric stacks Applied Physics Letters. 89
Edge LF, Schlom DG, Rivillon S, et al. (2006) Thermal stability of amorphous LaScO 3 films on silicon Applied Physics Letters. 89
Agustin MP, Bersuker G, Foran B, et al. (2006) Scanning transmission electron microscopy investigations of interfacial layers in HfO 2 gate stacks Journal of Applied Physics. 100
McCarthy I, Agustin MP, Shamuilia S, et al. (2006) Strontium hafnate films deposited by physical vapor deposition Thin Solid Films. 515: 2527-2530
Agustin MP, Fonseca LRC, Hooker JC, et al. (2005) Scanning transmission electron microscopy of gate stacks with HfO 2 dielectrics and TiN electrodes Applied Physics Letters. 87: 1-3
Li M, Zhang Z, Campbell SA, et al. (2005) Electrical and material characterizations of high-permittivity Hf x Ti 1-x O 2 gate insulators Journal of Applied Physics. 98
Lichtenwalner DJ, Jur JS, Kingon AI, et al. (2005) Lanthanum silicate gate dielectric stacks with subnanometer equivalent oxide thickness utilizing an interfacial silica consumption reaction Journal of Applied Physics. 98
Agustin MP, Fonseca LRC, Hooker JH, et al. (2005) HAADF Imaging and Low-Loss EELS Investigation of HfO2/TiN Interfaces in High-k Gate Stacks Microscopy and Microanalysis. 11: 1446-1447
Foran B, Barnett J, Lysaght PS, et al. (2005) Characterization of advanced gate stacks for Si CMOS by electron energy-loss spectroscopy in scanning transmission electron microscopy Journal of Electron Spectroscopy and Related Phenomena. 143: 149-158
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