Collin A. Rich, Ph.D.

2000

Kensall D. Wise	grad student	2000	University of Michigan
(A thermopneumatically -actuated silicon microvalve and integrated microflow controller.)

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Lemmerhirt DF, Borna A, Alvar S, et al. (2014) CMUT-in-CMOS 2D arrays with advanced multiplexing and time-gain control Ieee International Ultrasonics Symposium, Ius. 582-586
Lemmerhirt DF, Cheng X, White R, et al. (2012) A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS. Ieee Transactions On Ultrasonics, Ferroelectrics, and Frequency Control. 59: 1521-36
Doody CB, Cheng X, Rich CA, et al. (2011) Modeling and characterization of CMOS-fabricated capacitive micromachined ultrasound transducers Journal of Microelectromechanical Systems. 20: 104-118
Cheng X, Lemmerhirt DF, Kripfgans OD, et al. (2009) CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1222-1225
Rich CA, Wise KD. (2003) A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing Journal of Microelectromechanical Systems. 12: 201-208
Rich CA, Wise KD. (1999) 8-Bit microflow controller using pneumatically-actuated microvalves Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 130-134