Gary K. Fedder, Ph.D. - Publications

Affiliations: 
Institute for Complex Engineered Systems Carnegie Mellon University, Pittsburgh, PA 
Website:
http://www.ece.cmu.edu/~mems/

180 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2018 Forssell M, Ong XC, Khilwani R, Burak Ozdoganlar O, Fedder GK. Insulation of thin-film parylene-C/platinum probes in saline solution through encapsulation in multilayer ALD ceramic films. Biomedical Microdevices. 20: 61. PMID 30051149 DOI: 10.1007/s10544-018-0307-3  0.92
2016 Ong XC, Willard A, Forssell M, Gittis A, Fedder GK, Xiao Chuan Ong, Willard A, Forssell M, Gittis A, Fedder GK, Forssell M, Gittis A, Fedder GK, Willard A, Ong XC. A silicon neural probe fabricated using DRIE on bonded thin silicon. Conference Proceedings : ... Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Annual Conference. 2016: 4885-4888. PMID 28227607 DOI: 10.1109/EMBC.2016.7591822  0.92
2016 Khilwani R, Gilgunn PJ, Kozai TD, Ong XC, Korkmaz E, Gunalan PK, Cui XT, Fedder GK, Ozdoganlar OB. Ultra-miniature ultra-compliant neural probes with dissolvable delivery needles: design, fabrication and characterization. Biomedical Microdevices. 18: 97. PMID 27778225 DOI: 10.1007/s10544-016-0125-4  0.92
2016 Naserifar N, LeDuc PR, Fedder GK. Material Gradients in Stretchable Substrates toward Integrated Electronic Functionality. Advanced Materials (Deerfield Beach, Fla.). PMID 26989814 DOI: 10.1002/adma.201505818  1
2015 Tatar E, Mukherjee T, Fedder GK. Nonlinearity tuning and its effects on the performance of a MEMS gyroscope 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 1133-1136. DOI: 10.1109/TRANSDUCERS.2015.7181127  1
2015 Gao J, Guo D, Santhanam S, Fedder GK. Large stroke electrostatic actuated PDMS-on-silicon micro-pump 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 117-120. DOI: 10.1109/TRANSDUCERS.2015.7180875  1
2015 Yen S, Shi L, Piazza G, Fedder GK, Mukherjee T. A tunable notch filter using high-kt 2 lithium niobate resonators toward integration in filter banks 2015 Ieee Mtt-S International Microwave Symposium, Ims 2015. DOI: 10.1109/MWSYM.2015.7167096  1
2015 Patterson A, Calayir E, Fedder GK, Piazza G, Soon BW, Singh N. Application of statistical element selection to 3D integrated AlN MEMS filters for performance correction and yield enhancement Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 996-999. DOI: 10.1109/MEMSYS.2015.7051129  1
2015 Tatar E, Mukherjee T, Fedder GK. On-chip characterization of stress effects on gyroscope zero rate output and scale factor Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 813-816. DOI: 10.1109/MEMSYS.2015.7051083  1
2015 Gao J, Guo D, Santhanam S, Fedder GK. Material Characterization and Transfer of Large-Area Ultra-Thin Polydimethylsiloxane Membranes Journal of Microelectromechanical Systems. DOI: 10.1109/JMEMS.2015.2480388  1
2014 Kozai TD, Gugel Z, Li X, Gilgunn PJ, Khilwani R, Ozdoganlar OB, Fedder GK, Weber DJ, Cui XT. Chronic tissue response to carboxymethyl cellulose based dissolvable insertion needle for ultra-small neural probes. Biomaterials. 35: 9255-68. PMID 25128375 DOI: 10.1016/j.biomaterials.2014.07.039  1
2014 Lazarus N, Jin R, Fedder GK. The use of coated gold nanoparticles in high performance chemical sensors Nanosensors For Chemical and Biological Applications: Sensing With Nanotubes, Nanowires and Nanoparticles. 231-253. DOI: 10.1533/9780857096722.2.231  1
2014 Tatar E, Mukherjee T, Fedder GK. Simulation of stress effects on mode-matched MEMS gyroscope bias and scale factor Record - Ieee Plans, Position Location and Navigation Symposium. 16-20. DOI: 10.1109/PLANS.2014.6851352  1
2014 Tatar E, Mukherjee T, Fedder GK. Tuning of nonlinearities and quality factor in a mode-matched gyroscope Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 801-804. DOI: 10.1109/MEMSYS.2014.6765762  1
2014 Gao J, Guo D, Santhanam S, Yu Y, McGaughey AJH, Yao SC, Fedder GK. Release and transfer of large-area ultra-thin PDMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 544-547. DOI: 10.1109/MEMSYS.2014.6765698  1
2014 Tatar E, Guo C, Mukherjee T, Fedder GK. Effect of stress on matched-mode gyroscope frequencies 1st Ieee International Symposium On Inertial Sensors and Systems, Isiss 2014 - Proceedings. DOI: 10.1109/ISISS.2014.6782535  1
2014 Dorsey KL, Bedair SS, Fedder GK. Gas chemical sensitivity of a CMOS MEMS cantilever functionalized via evaporation driven assembly Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/7/075001  1
2014 Ong XC, Fedder GK, Gilgunn PJ. Modulation of Parylene-C to silicon adhesion using HMDS priming Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/10/105001  1
2014 Guo D, Gao J, Yu YJ, Santhanam S, Fedder GK, McGaughey AJH, Yao SC. Electrocaloric characterization of a poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) terpolymer by infrared imaging Applied Physics Letters. 105. DOI: 10.1063/1.4890676  1
2014 Khairi A, Thaokar C, Fedder G, Paramesh J, Rabin Y. Characterization of a CMOS sensing core for ultra-miniature wireless implantable temperature sensors with application to cryomedicine Medical Engineering and Physics. 36: 1191-1196. DOI: 10.1016/j.medengphy.2014.05.002  1
2014 Guo D, Gao J, Yu YJ, Santhanam S, Slippey A, Fedder GK, McGaughey AJH, Yao SC. Design and modeling of a fluid-based micro-scale electrocaloric refrigeration system International Journal of Heat and Mass Transfer. 72: 559-564. DOI: 10.1016/j.ijheatmasstransfer.2014.01.043  1
2013 Habeeb Rakuman WF, Ong XC, Tetikol HS, Khilwani R, Cui XT, Ozdoganlar OB, Fedder GK, Gilgunn PJ. Ultra-compliant neural probes are subject to fluid forces during dissolution of polymer delivery vehicles. Conference Proceedings : ... Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Annual Conference. 2013: 1550-3. PMID 24109996 DOI: 10.1109/EMBC.2013.6609809  1
2013 Karagozler ME, Poupyrev I, Fedder GK, Suzuki Y. Paper generators: Harvesting energy from touching, rubbing and sliding Uist 2013 - Proceedings of the 26th Annual Acm Symposium On User Interface Software and Technology. 23-30. DOI: 10.1145/2501988.2502054  1
2013 Guo D, Gao J, Yu YJ, Santhanam S, Fedder GK, Mcgaughey AJH, Yao SC, Slippey A. Design of a fluid-based micro-scale electrocaloric refrigeration system Asme 2013 Heat Transfer Summer Conf. Collocated With the Asme 2013 7th Int. Conf. On Energy Sustainability and the Asme 2013 11th Int. Conf. On Fuel Cell Science, Engineering and Technology, Ht 2013. 1. DOI: 10.1115/HT2013-17396  1
2013 Guo C, Fedder GK. Bi-state bifurcation control of a shaped-comb parametric resonator Proceedings of the Asme Design Engineering Technical Conference. 1. DOI: 10.1115/DETC2013-13001  1
2013 Guo D, Gao J, McGaughey AJH, Fedder GK, Moran M, Yao SC. Design and evaluation of a MEMS-based stirling microcooler Journal of Heat Transfer. 135. DOI: 10.1115/1.4024596  1
2013 Tatar E, Guo C, Mukherjee T, Fedder GK. Interaction effects of temperature and stress on matched-mode gyroscope frequencies 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 2527-2530. DOI: 10.1109/Transducers.2013.6627320  1
2013 Guo C, Fedder GK. Bi-state control of a duffing microresonator on the falling edge of the instability 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 1703-1706. DOI: 10.1109/Transducers.2013.6627114  1
2013 Fang YJ, Mukherjee T, Fedder GK. SI-CMOS-MEMS dual mass resonator for extracting mass and spring variations Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 657-660. DOI: 10.1109/MEMSYS.2013.6474327  1
2013 Zhang Y, Tang Y, Carley LR, Fedder GK. Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 524-527. DOI: 10.1109/MEMSYS.2013.6474294  1
2013 Guo C, Tatar E, Fedder GK. Large-displacement parametric resonance using a shaped comb drive Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 173-176. DOI: 10.1109/MEMSYS.2013.6474205  1
2013 Tang Y, Zhang Y, Fedder GK, Carley LR. A dual probe stm imaging system and a low noise switched-capacitor transimpedance amplifier Ieee Sensors Journal. 13: 2984-2992. DOI: 10.1109/JSEN.2013.2264806  1
2013 Guo C, Fedder GK. Behavioral modeling of a CMOS-MEMS nonlinear parametric resonator Journal of Microelectromechanical Systems. 22: 1447-1457. DOI: 10.1109/JMEMS.2013.2262589  1
2013 Khairi A, Wu C, Rabin Y, Fedder G, Paramesh J, Schwartzman D. Ultra-low power frequency and duty-cycle modulated implantable pressure-temperature sensor 2013 Ieee Biomedical Circuits and Systems Conference, Biocas 2013. 226-229. DOI: 10.1109/BioCAS.2013.6679680  1
2013 Guo C, Fedder GK. A quadratic-shaped-finger comb parametric resonator Journal of Micromechanics and Microengineering. 23. DOI: 10.1088/0960-1317/23/9/095007  1
2013 Guo C, Fedder GK. Bi-state control of parametric resonance Applied Physics Letters. 103. DOI: 10.1063/1.4828564  1
2013 Guo D, McGaughey AJH, Gao J, Fedder GK, Lee M, Yao SC. Multiphysics modeling of a micro-scale Stirling refrigeration system International Journal of Thermal Sciences. 74: 44-52. DOI: 10.1016/j.ijthermalsci.2013.07.003  1
2012 Wang F, Keskin G, Phelps A, Rotner J, Li X, Fedder GK, Mukherjee T, Pileggi LT. Statistical design and optimization for adaptive post-silicon tuning of MEMS filters Proceedings - Design Automation Conference. 176-181. DOI: 10.1145/2228360.2228395  1
2012 Camacho-León S, Gilgunn PJ, Martínez-Chapa SO, Fedder GK. A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators Proceedings of Spie - the International Society For Optical Engineering. 8252. DOI: 10.1117/12.908751  1
2012 Guo D, McGaughey AJH, Gao J, Fedder GK, Lee M, Yao SC. Numerical modeling of a micro-scale stirling cooler Asme 2012 Heat Transfer Summer Conf. Collocated With the Asme 2012 Fluids Engineering Div. Summer Meeting and the Asme 2012 10th Int. Conf. On Nanochannels, Microchannels and Minichannels, Ht 2012. 1: 331-337. DOI: 10.1115/HT2012-58361  1
2012 Guo C, Fedder GK. Behavioral modeling and testing of a CMOS-MEMS parametric resonator governed by the nonlinear Mathieu equation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 535-538. DOI: 10.1109/MEMSYS.2012.6170233  1
2012 Dorsey K, Fedder G. A test structure to inform the effects of dielectric charging on CMOS MEMS inertial sensors Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 392-395. DOI: 10.1109/MEMSYS.2012.6170162  1
2012 Gilgunn PJ, Khilwani R, Kozai TDY, Weber DJ, Cui XT, Erdos G, Ozdoganlar OB, Fedder GK. An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 56-59. DOI: 10.1109/MEMSYS.2012.6170092  1
2012 Tang Y, Zhang Y, Fedder GK, Carley LR. An ultra-low noise Switched Capacitor Transimpedance Amplifier for parallel Scanning Tunneling Microscopy Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411083  1
2012 Lazarus N, Fedder GK. Designing a robust high-speed CMOS-MEMS capacitive humidity sensor Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/8/085021  1
2012 Curri L, Fedder G, Pruitt BL. Editorial Micro and Nano Letters. 7: 296. DOI: 10.1049/mnl.2012.0244  1
2011 Fedder GK. CMOS MEMS integration Ecs Transactions. 35: 331-340. DOI: 10.1149/1.3568876  1
2011 Zhang Y, Wang J, Santhanam S, Fedder GK. Active CMOS-MEMS conductive probes and arrays for tunneling-based atomic-level surface imaging 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2446-2449. DOI: 10.1109/TRANSDUCERS.2011.5969662  1
2011 Guo C, Shah KM, Fedder GK. Electrically driven CMOS-MEMS nonlinear parametric resonator design using a hierarchical MEMS circuit library 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2402-2405. DOI: 10.1109/TRANSDUCERS.2011.5969600  1
2011 Dorsey KL, Fedder GK. A Frenkel-Poole model of dielectric charging in CMOS MEMS 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 823-826. DOI: 10.1109/TRANSDUCERS.2011.5969595  1
2011 Fang YJ, Mukherjee T, Fedder GK. Refined Si-CMOS-MEMS process using AOE, drie and preform bonding 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 1380-1383. DOI: 10.1109/TRANSDUCERS.2011.5969527  1
2011 Reinke J, Fedder GK, Mukherjee T. CMOS-MEMS 3-bit digital capacitors with tuning ratios greater than 60:1 Ieee Transactions On Microwave Theory and Techniques. 59: 1238-1248. DOI: 10.1109/TMTT.2011.2114363  1
2011 Draghi LJ, Bain JA, Fedder GK. Self-engaging and disengaging CMOS-MEMS probes Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1273-1276. DOI: 10.1109/MEMSYS.2011.5734665  1
2011 Guo C, Fedder GK. 2-DoF twisting electrothermal actuator for Scanning Laser Rangefinder application Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1205-1208. DOI: 10.1109/MEMSYS.2011.5734648  1
2011 Reinke J, Wang L, Fedder GK, Mukherjee T. A 4-bit RF MEMS phase shifter monolithically integrated with conventional CMOS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 748-751. DOI: 10.1109/MEMSYS.2011.5734533  1
2011 Lazarus N, Fedder GK. Integrated vertical parallel-plate capacitive humidity sensor Journal of Micromechanics and Microengineering. 21. DOI: 10.1088/0960-1317/21/6/065028  1
2011 Fedder GK, Mukherjee T, Pileggi L. Self-configuring CMOS microsystems Lecture Notes in Control and Information Sciences. 413: 181-200. DOI: 10.1007/978-3-642-22173-6_11  1
2011 Guo D, Gao J, McGaughey AJH, Moran M, Santhanam S, Fedder GK, Anderson B, Yao SC. Design and evaluation of MEMS-based stirling cycle micro-refrigeration system Asme 2011 International Mechanical Engineering Congress and Exposition, Imece 2011. 4: 83-90.  1
2010 Garg N, Mohanty A, Lazarus N, Schultz L, Rozzi TR, Santhanam S, Weiss L, Snyder JL, Fedder GK, Jin R. Robust gold nanoparticles stabilized by trithiol for application in chemiresistive sensors. Nanotechnology. 21: 405501. PMID 20823495 DOI: 10.1088/0957-4484/21/40/405501  1
2010 Gilgunn PJ, Alfaro JF, Fedder GK. Model for aspect ratio dependent etch modulated processing Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 28: 334-346. DOI: 10.1116/1.3305716  1
2010 Liu J, Draghi L, Bain JA, Schlesinger TE, Fedder GK. Three-dof CMOS-MEMS probes with embedded piezoresistive sensors Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 284-287. DOI: 10.1109/MEMSYS.2010.5442511  1
2010 Gilgunn PJ, Fedder GK. Mechanisms of process-induced heating of MEMS structures during plasma release etch Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 320-323. DOI: 10.1109/MEMSYS.2010.5442500  1
2010 Zhang Y, Santhanam S, Liu J, Fedder GK. Active CMOS-MEMS AFM-like conductive probes for field-emission assisted nano-scale fabrication Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 336-339. DOI: 10.1109/MEMSYS.2010.5442496  1
2010 Fang YJ, Wung A, Mukherjee T, Fedder GK. A SI-CMOS-MEMS process using back-side grinding Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 364-367. DOI: 10.1109/MEMSYS.2010.5442491  1
2010 Gilgunn PJ, Fedder GK. Scaling of folded electrothermal actuators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1151-1154. DOI: 10.1109/MEMSYS.2010.5442415  1
2010 Liu J, Draghi L, Noman M, Bain JA, Schlesinger TE, Fedder GK. High current low contact resistance platinum-coated CMOS-MEMS probes Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1143-1146. DOI: 10.1109/MEMSYS.2010.5442413  1
2010 Ricketts DS, Bain JA, Luo Y, Blanton RD, Mai K, Fedder GK. Enhancing CMOS using nanoelectronic devices: A perspective on hybrid integrated systems Proceedings of the Ieee. 98: 2061-2075. DOI: 10.1109/JPROC.2010.2064270  1
2010 Reinke J, Fedder GK, Mukherjee T. CMOS-MEMS variable capacitors using electrothermal actuation Journal of Microelectromechanical Systems. 19: 1105-1115. DOI: 10.1109/JMEMS.2010.2067197  1
2010 Lazarus N, Bedair SS, Lo CC, Fedder GK. CMOS-MEMS capacitive humidity sensor Journal of Microelectromechanical Systems. 19: 183-191. DOI: 10.1109/JMEMS.2009.2036584  1
2010 Dorsey KL, Fedder GK. Dielectric charging effects in electrostatically actuated CMOS MEMS resonators Proceedings of Ieee Sensors. 197-200. DOI: 10.1109/ICSENS.2010.5690413  1
2010 Kenny T, Fedder G. Proceedings of IEEE Sensors: Forward Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2010.5689840  1
2010 Gilgunn PJ, Fedder GK. On the origin of selectivity and anisotropy loss during microstructure release etch Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/3/035021  1
2010 Bain JA, El-Ghazaly A, Bromberg D, Fedder GK, Messner WC. Electrothermal actuators for hard disk drive applications Digest of the Asia-Pacific Magnetic Recording Conference 2010, Apmrc 2010 1
2009 Bedair SS, Fedder GK. Picogram material dosing of microstructures. Journal of Applied Physics. 106: 104913. PMID 20052313 DOI: 10.1063/1.3248305  1
2009 Messner WC, Bain JA, Koenders M, Groenesteijn J, Marsman GH, Gilgunn PJ, Fedder GK. A CMOS-MEMS rotary microactuator suitable for hard disk drive applications Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1509-1512. DOI: 10.1109/SENSOR.2009.5285802  1
2009 Gilgunn PJ, Alfaro JF, Fedder GK. Aspect ratio dependent etch modulation for CMOS-MEMS applications Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 216-219. DOI: 10.1109/SENSOR.2009.5285524  1
2009 Liu J, Noman M, Bain JA, Schlesinger TE, Fedder GK. Polysilicon sensors for CMOS-MEMS electrothermal probes Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2425-2428. DOI: 10.1109/SENSOR.2009.5285434  1
2009 Reinke J, Jajoo A, Wang L, Fedder G, Mukherjee T. CMOS-MEMS variable capacitors with low parasitic capacitance for frequency-reconfigurable RF circuits Digest of Papers - Ieee Radio Frequency Integrated Circuits Symposium. 509-512. DOI: 10.1109/RFIC.2009.5135591  1
2009 Liu J, Noman M, Bain JA, Schlesinger TE, Fedder GK. Lever-based cmos-mems probes for reconfigurable RF IC'S Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1111-1114. DOI: 10.1109/MEMSYS.2009.4805582  1
2009 Liu J, Draghi L, Noman M, Bain JA, Schlesinger TE, Fedder GK. Platinum sputtered CMOS-MEMS electrothermal probes with piezoresistive force sensing Proceedings of Ieee Sensors. 1911-1914. DOI: 10.1109/ICSENS.2009.5398369  1
2009 Mukherjee T, Fedder GK. RF-CMOS-MEMS based frequency-reconfigurable amplifiers Proceedings of the Custom Integrated Circuits Conference. 81-84. DOI: 10.1109/CICC.2009.5280891  1
2009 Alfaro F, Weiss L, Campbell P, Miller M, Fedder GK. Design of a multi-axis implantable MEMS sensor for intraosseous bone stress monitoring Journal of Micromechanics and Microengineering. 19. DOI: 10.1088/0960-1317/19/8/085016  1
2008 Fedder GK, Mukherjee T. CMOS-MEMS filters 2008 Ieee Topical Meeting On Silicon Monolithic Integrated Circuits in Rf Systms - Digest of Papers, Sirf. 110-113. DOI: 10.1109/SMIC.2008.34  1
2008 Wung A, Park RV, Rebello KJ, Fedder GK. Tri-axial high-G CMOS-MEMS capacitive accelerometer array Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 876-879. DOI: 10.1109/MEMSYS.2008.4443796  1
2008 Liu J, Noman M, Bain JA, Schlesinger TE, Fedder GK. CMOS-MEMS probes for reconfIGURABLE IC's Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 515-518. DOI: 10.1109/MEMSYS.2008.4443706  1
2008 Fedder GK, Howe RT, Liu TJK, Quévy EP. Technologies for cofabricating MEMS and electronics Proceedings of the Ieee. 96: 306-322. DOI: 10.1109/JPROC.2007.911064  1
2008 Gilgunn PJ, Liu J, Sarkar N, Fedder GK. CMOS-MEMS lateral electrothermal actuators Journal of Microelectromechanical Systems. 17: 103-114. DOI: 10.1109/JMEMS.2007.911373  1
2008 Chen JY, Hsu YC, Lee SS, Mukherjee T, Fedder GK. Modeling and simulation of a condenser microphone Sensors and Actuators, a: Physical. 145: 224-230. DOI: 10.1016/j.sna.2007.12.011  1
2007 Lo CC, Fedder GK. On-chip high quality factor CMOS-MEMS silicon-fin resonators Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 2449-2452. DOI: 10.1109/SENSOR.2007.4300666  1
2007 Liu J, Fedder GK. Silicon undercut characterization in a CMOS-MEMS process Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 505-508. DOI: 10.1109/SENSOR.2007.4300178  1
2007 Karagozler ME, Campbell JD, Fedder GK, Goldstein SC, Weller MP, Yoon BW. Electrostatic latching for inter-module adhesion, power transfer, and communication in modular robots Ieee International Conference On Intelligent Robots and Systems. 2779-2786. DOI: 10.1109/IROS.2007.4399492  1
2007 Chen JY, Lee SS, Chang P, Chu CH, Mukherjee T, Fedder G. A schematic-based design model for microphone and circuit integration Proceedings of Technical Papers - 2007 International Microsystems, Packaging, Assembly and Circuits Technology Conference, Impact. 157-160. DOI: 10.1109/IMPACT.2007.4433590  1
2007 Bedair SS, Fedder GK. Polymer mass loading of CMOS/MEMS microslot cantilever for gravimetric sensing Proceedings of Ieee Sensors. 1164-1167. DOI: 10.1109/ICSENS.2007.4388614  1
2007 Hsu YC, Chen JY, Mukherjee T, Fedder GK. An optimal design of high performance interface circuit with acoustic transducer model 2007 Ieee Asian Solid-State Circuits Conference, a-Sscc. 280-283. DOI: 10.1109/ASSCC.2007.4425685  1
2007 Li B, Santhanam S, Schultz L, Jeffries-EL M, Iovu MC, Sauvé G, Cooper J, Zhang R, Revelli JC, Kusne AG, Snyder JL, Kowalewski T, Weiss LE, McCullough RD, Fedder GK, et al. Inkjet printed chemical sensor array based on polythiophene conductive polymers Sensors and Actuators, B: Chemical. 123: 651-660. DOI: 10.1016/j.snb.2006.09.064  1
2006 Bartkovsky MJ, Liao A, Fedder GK, Przybycien TM, Hauan S. The effect of a distributed mass loading on the frequency response of a MEMS mesh resonator. Conference Proceedings : ... Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Annual Conference. 1: 1862-5. PMID 17946075 DOI: 10.1109/IEMBS.2006.259823  1
2006 Bedair SS, Bo L, Cooper JR, Santhanam S, McCullough RD, Lambeth DN, Fedder GK. A CMOS MEMS gold plated electrode array for chemical vapor detection Proceedings of Ieee Sensors. 1074-1077. DOI: 10.1109/ICSENS.2007.355811  1
2006 Li B, Zhang R, Sauvé G, Cooper J, Iovu MC, Santhanam S, Schultz L, Snyder JL, Weiss LE, Kowalewski T, Fedder GK, McCullough RD, Lambeth DN. Nanostructure dependence of conductive polymer chemical sensors Proceedings of Ieee Sensors. 843-846. DOI: 10.1109/ICSENS.2007.355599  1
2006 Yao SC, Tang X, Hsieh CC, Alyousef Y, Vladimer M, Fedder GK, Amon CH. Micro-electro-mechanical systems (MEMS)-based micro-scale direct methanol fuel cell development Energy. 31: 636-649. DOI: 10.1016/j.energy.2005.10.016  1
2006 Fedder GK. System-Level Simulation of Microsystems Mems. 187-227. DOI: 10.1016/B978-081551497-8.50006-8  1
2006 Liu J, Fedder GK, Sassolini S, Sarkar N. Mechanical properties measurements of 0.35-μm BiCMOS MEMS structures 2006 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2006 Technical Proceedings. 3: 546-549.  1
2006 Sarkar N, Baur C, Stach E, Jandric Z, Stallcup R, Ellis M, Skidmore G, Liu J, Fedder GK. Modular MEMS experimental platform for transmission electron microscopy Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 146-149.  1
2005 McCullough RD, Sauvé G, Li B, Jeffries-El M, Santhanam S, Schultz L, Zhang R, Iovu MC, Cooper J, Sreedharan P, Revelli JC, Kusner AG, Kowalewski T, Snyder JL, Weiss LE, ... ... Fedder GK, et al. Regioregular polythiophene nanowires and sensors Proceedings of Spie - the International Society For Optical Engineering. 5940: 1-7. DOI: 10.1117/12.619609  1
2005 Xie H, Fedder GK, Pan Y. MEMS based endoscopic optical coherence tomography Progress in Biomedical Optics and Imaging - Proceedings of Spie. 5721: 81-92. DOI: 10.1117/12.597616  1
2005 Bedair SS, Fedder GK. Polymer wicking to mass load cantilevers for chemical gravimetric sensors Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 2035-2039. DOI: 10.1109/SENSOR.2005.1497502  1
2005 Basset P, Alfaro F, Novosel D, De La Plaza A, Stancil D, Fedder GK. "Chip-size" antennas for implantable sensors and smart dust Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 457-460. DOI: 10.1109/SENSOR.2005.1496453  1
2005 Voiculescu I, Zaghloul ME, Mcgill RA, Houser EJ, Fedder GK. Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons Ieee Sensors Journal. 5: 641-647. DOI: 10.1109/JSEN.2005.851016  1
2005 Li B, Santhanam S, Schultz L, Jeffries-El M, Iovu MC, Sauvé G, Cooper J, Zhang R, Revelli JC, Kusne AG, Kowalewski T, Weiss LE, McCullough RD, Fedder GK, Lambeth DN, et al. Volatile organic compound discrimination using nanostructured polythiophene sensors Proceedings of Ieee Sensors. 2005: 191-194. DOI: 10.1109/ICSENS.2005.1597668  1
2005 Subrebost GL, Fedder GK. Silicon-based microdialysis chip with integrated fraction collection Proceedings of Ieee Sensors. 2005: 179-182. DOI: 10.1109/ICSENS.2005.1597665  1
2005 Fedder GK. CMOS-based sensors Proceedings of Ieee Sensors. 2005: 125-128. DOI: 10.1109/ICSENS.2005.1597652  1
2005 Fedder GK, Mukherjee T. Tunable RF and analog circuits using on-chip MEMS passive components Digest of Technical Papers - Ieee International Solid-State Circuits Conference. 48: 316-317+659.  1
2005 Fernando Alfaro J, Weiss LE, Campbell PG, Miller MC, Heyward C, Doctor JS, Fedder GK. BioImplantable bone stress sensor Annual International Conference of the Ieee Engineering in Medicine and Biology - Proceedings. 7: 518-521.  1
2005 Fedder GK. CMOS-MEMS resonant mixer-filters Technical Digest - International Electron Devices Meeting, Iedm. 2005: 274-277.  1
2005 Bartkovsky MJ, Liao A, Hauan S, Przybycien TM, Fedder GK. Computer-aided design and fabrication of a mems based acoustic-wave biosensor Aiche Annual Meeting, Conference Proceedings. 11972.  1
2005 Bartkovsky MJ, Liao A, Przybycien TM, Hauan S, Fedder GK. A mems based acoustic-wave gravimetric biosensor: Device characterization andperformance Aiche Annual Meeting, Conference Proceedings. 11727-11728.  1
2005 D'Amico W, Rebello KJ, Park RV, Fedder GK. Common Electrical Block CMOS-Based MEMS Sensors for Embedded Instrumentation Proceedings of the International Telemetering Conference. 41.  1
2005 Lo CC, Chen F, Fedder GK. Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 2074-2077.  1
2005 Tsai JM, Fedder GK. Mechanical noise-limited CMOS-MEMS accelerometers Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 630-633.  1
2005 Chen F, Brotz J, Arslan U, Lo CC, Mukherjee T, Fedder GK. CMOS-MEMS resonant RF mixer-filters Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 24-27.  1
2005 Bright VM, Fedder GK. MEMS 2005 Miami Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). III.  1
2005 Subrebost GL, Fedder GK. Adhesion mechanisms for phase separated polymer films using interlocking microstructures and surface chemical treatment Micro Total Analysis Systems - Proceedings of Microtas 2005 Conference: 9th International Conference On Miniaturized Systems For Chemistry and Life Sciences. 1: 247-249.  1
2004 Lu MSC, Fedder GK. Position control of parallel-plate microactuators for probe-based data storage Journal of Microelectromechanical Systems. 13: 759-769. DOI: 10.1109/JMEMS.2004.835761  1
2004 Lakdawala H, Fedder GK. Temperature stabilization of CMOS capacitive accelerometers Journal of Micromechanics and Microengineering. 14: 559-566. DOI: 10.1088/0960-1317/14/4/017  1
2004 Yun H, Patton ME, Garrett JH, Fedder GK, Frederick KM, Hsu JJ, Lowe IJ, Oppenheim IJ, Sides PJ. Detection of free chloride in concrete by NMR Cement and Concrete Research. 34: 379-390. DOI: 10.1016/j.cemconres.2003.08.020  1
2004 Bedair SS, Fedder GK. CMOS MEMS oscillator for gas chemical detection Proceedings of Ieee Sensors. 2: 955-958.  1
2004 Ramachandran D, Oz A, Saraf VK, Fedder GK, Mukherjee T. MEMS-enabled reconfigurable VCO and RF filter Ieee Radio Frequency Integrated Circuits Symposium, Rfic, Digest of Technical Papers. 251-254.  1
2004 Saraf VK, Ramachandran D, Oz A, Fedder GK, Mukherjee T. Low-power LC-VCO using integrated MEMS passives Ieee Radio Frequency Integrated Circuits Symposium, Rfic, Digest of Technical Papers. 579-582.  1
2003 Xie T, Xie H, Fedder GK, Pan Y. Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers. Applied Optics. 42: 6422-6. PMID 14649286  1
2003 Oz A, Fedder GK. RF CMOS-MEMS capacitor having large tuning range Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 851-854. DOI: 10.1109/SENSOR.2003.1215608  1
2003 Jain A, Xie T, Pan Y, Fedder GK, Xie H. A two-axis electrothermal SCS micromirror for biomedical imaging 2003 Ieee/Leos International Conference On Optical Mems. 14-15. DOI: 10.1109/OMEMS.2003.1233444  1
2003 Xie H, Fedder GK. Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope Ieee Sensors Journal. 3: 622-631. DOI: 10.1109/JSEN.2003.817901  1
2003 Xie H, Pan Y, Fedder GK. A CMOS-MEMS mirror with curled-hinge comb drives Journal of Microelectromechanical Systems. 12: 450-457. DOI: 10.1109/JMEMS.2003.815839  1
2003 Wong GC, Tse GK, Jing Q, Mukherjee T, Fedder GK. Accuracy and composability in NODAS Proceedings of the Ieee International Workshop On Behavioral Modeling and Simulation, Bmas. 2003: 82-87. DOI: 10.1109/BMAS.2003.1249862  1
2003 Xie H, Fedder GK. Integrated microelectromechanical gyroscopes Journal of Aerospace Engineering. 16: 65-75. DOI: 10.1061/(ASCE)0893-1321(2003)16:2(65)  1
2003 Xie T, Xie H, Fedder GK, Pan Y. Endoscopic optical coherence tomography with new MEMS mirror Electronics Letters. 39: 1535-1536. DOI: 10.1049/el:20030998  1
2003 Xie H, Pan Y, Fedder GK. Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror Sensors and Actuators, a: Physical. 103: 237-241. DOI: 10.1016/S0924-4247(02)00347-3  1
2003 Xie H, Fedder GK, Pan Z, Frey W. Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer 2003 Nanotechnology Conference and Trade Show - Nanotech 2003. 2: 420-423.  1
2003 Fedder GK. MEMS fabrication Ieee International Test Conference (Tc). 691-698.  1
2003 Oz A, Fedder GK. CMOS-compatible RF-MEMS tunable capacitors Ieee Radio Frequency Integrated Circuits Symposium, Rfic, Digest of Technical Papers. 611-614.  1
2003 Zhu X, Groves R, Subbanna S, Jadus D, Mukherjee T, Fedder GK. Micromachined on-chip inductor performance analysis Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 165-168.  1
2003 Xie H, Jain A, Xie T, Pan Y, Fedder GK. A single-crystal silicon-based micromirror with large scanning angle for biomedical applications Osa Trends in Optics and Photonics Series. 88: 861-863.  1
2002 Jing Q, Mukherjee T, Fedder GK. Schematic-based lumped parameterized behavioral modeling for suspended MEMS Ieee/Acm International Conference On Computer-Aided Design, Digest of Technical Papers. 367-373. DOI: 10.1145/774572.774627  1
2002 Yun H, Patton ME, Garrett JH, Fedder GK, Frederick KM, Hsu JJ, Lowe IJ, Oppenheim IJ, Sides P. Developments in chlorine detection in concrete using NMR Proceedings of Spie - the International Society For Optical Engineering. 4696: 310-321. DOI: 10.1117/12.472568  1
2002 Iyer SV, Lakdawala H, Mukherjee T, Fedder GK. Modeling methodology for a CMOS-MEMS electrostatic comb Proceedings of Spie - the International Society For Optical Engineering. 4755: 114-125. DOI: 10.1117/12.462801  1
2002 Yao SC, Fedder GK, Amon CH, Hsieh CC, Tang X, Alyousef Y. Design of direct methanol micro fuel cell fluidic systems American Society of Mechanical Engineers, Heat Transfer Division, (Publication) Htd. 372: 431-436. DOI: 10.1115/IMECE2002-32567  1
2002 Luo H, Zhang G, Carley LR, Fedder GK. A post-CMOS micromachined lateral accelerometer Journal of Microelectromechanical Systems. 11: 188-195. DOI: 10.1109/JMEMS.2002.1007397  1
2002 Xie H, Erdmann L, Zhu X, Gabriel KJ, Fedder GK. Post-CMOS processing for high-aspect-ratio integrated silicon microstructures Journal of Microelectromechanical Systems. 11: 93-101. DOI: 10.1109/84.993443  1
2002 Lakdawala H, Zhu X, Luo H, Santhanam S, Richard Carley L, Fedder GK. Micromachined high-Q inductors in a 0.18-μm copper interconnect low-K dielectric CMOS process Ieee Journal of Solid-State Circuits. 37: 394-403. DOI: 10.1109/4.987092  1
2002 Xie H, Fedder GK. Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS Sensors and Actuators, a: Physical. 95: 212-221. DOI: 10.1016/S0924-4247(01)00740-3  1
2002 Xie H, Fedder GK, Pan Z, Frey W. Phase and Vibration Analysis for a CMOS-MEMS Gyroscope International Journal of Nonlinear Sciences and Numerical Simulation. 3: 319-324.  1
2002 Alfaro JF, Fedder GK. Actuation for probe-based mass data storage 2002 International Conference On Modeling and Simulation of Microsystems - Msm 2002. 202-205.  1
2002 Xie H, Fedder GK. A DRIE CMOS-MEMS Gyroscope Proceedings of Ieee Sensors. 1: 1413-1418.  1
2002 Jing Q, Mukherjee T, Fedder GK. Large-deflection beam model for schematic-based behavioral simulation in NODAS 2002 International Conference On Modeling and Simulation of Microsystems - Msm 2002. 136-139.  1
2002 Wu J, Fedder GK, Carley LR. A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers Digest of Technical Papers - Ieee International Solid-State Circuits Conference. 348-349+540.  1
2002 Zahn JD, Gabriel KJ, Fedder GK. A direct plasma etch approach to high aspect ratio polymer micromachining with applications in biomems and CMOS-MEMS Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 137-140.  1
2002 Luo H, Zhu X, Lakdawala H, Carley LR, Fedder GK. A copper CMOS-MEMS Z-axis gyroscope Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 631-634.  1
2002 Lakdawala H, Fedder GK. Temperature control of CMOS micromachined sensors Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 324-327.  1
2002 Xie H, Pan Y, Fedder GK. A SCS CMOS micromirror for optical coherence tomographic imaging Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 495-498.  1
2001 Pan Y, Xie H, Fedder GK. Endoscopic optical coherence tomography based on a microelectromechanical mirror. Optics Letters. 26: 1966-8. PMID 18059747  1
2001 Chen F, Xie H, Fedder GK. A MEMS-based monolithic electrostatic microactuator for ultra-low magnetic disk head fly height control Ieee Transactions On Magnetics. 37: 1915-1918. DOI: 10.1109/20.951007  1
2001 Xie H, Pan Y, Fedder GK. A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (Mems). 3: 89-92.  1
2001 Iyer S, Jing Q, Fedder GK, Mukherjee T. Convergence and speed issues in analog HDL model formulation for MEMS 2001 International Conference On Modeling and Simulation of Microsystems - Msm 2001. 590-593.  1
2001 Iyer S, Lakdawala H, Fedder GK, Mukherjee T. Macromodeling temperature-dependent curl in CMOS micromachined beams 2001 International Conference On Modeling and Simulation of Microsystems - Msm 2001. 88-91.  1
2001 Lakdawala H, Zhu X, Luo H, Santhanam S, Carley LR, Fedder GK. Micromachined high-Q inductors in 0.18μm Cu interconnect low-K CMOS Proceedings of the Custom Integrated Circuits Conference. 579-582.  1
2001 Xie H, Fedder GK. A CMOS-MEMS lateral-axis gyroscope Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 162-165.  1
2000 Fedder GK. Top-down design of MEMS 2000 International Conference On Modeling and Simulation of Microsystems - Msm 2000. 7-10.  1
2000 Vemuri S, Fedder GK, Mukherjee T. Low-order squeeze film model for simulation of MEMS devices 2000 International Conference On Modeling and Simulation of Microsystems - Msm 2000. 205-208.  1
2000 Carley LR, Bain JA, Fedder GK, Greve DW, Guillou DF, Lu MSC, Mukherjee T, Santhanam S, Abelmann L, Min S. Single-chip computers with microelectromechanical systems-based magnetic memory (invited) Journal of Applied Physics. 87: 6680-6685.  1
1999 Fedder GK, Jing Q. A hierarchical circuit-level design methodology for microelectromechanical systems Ieee Transactions On Circuits and Systems Ii: Analog and Digital Signal Processing. 46: 1309-1315. DOI: 10.1109/82.799682  1
1999 Mukherjee T, Fedder GK, Blanton RD. Hierarchical Design and Test of Integrated Microsystems Ieee Design and Test of Computers. 16: 18-27. DOI: 10.1109/54.808200  1
1999 Mukherjee T, Fedder GK. Hierarchical mixed-domain circuit simulation, synthesis and extraction methodology for MEMS Journal of Vlsi Signal Processing Systems For Signal, Image, and Video Technology. 21: 233-249. DOI: 10.1023/A:1008122921631  1
1999 Eagle SC, Fedder GK. Writing nanometer-scale pits in sputtered carbon films using the scanning tunneling microscope Applied Physics Letters. 74: 3902-3903.  1
1998 Reed ML, Fedder GK. 2. Photolithographic microfabrication Handbook of Sensors and Actuators. 6: 13-61. DOI: 10.1016/S1386-2766(98)80003-0  1
1998 Lu MSC, Zhu X, Fedder GK. Mechanical property measurement of 0.5-μm CMOS microstructures Materials Research Society Symposium - Proceedings. 518: 27-32.  1
1998 Mukherjee T, Iyer S, Fedder GK. Optimization-based synthesis of microresonators Sensors and Actuators, a: Physical. 70: 118-127.  1
1997 Vandemeer JE, Kranz MS, Fedder GK. Nodal simulation of suspended MEMS with multiple degrees of freedom American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) Dsc. 62: 113-118.  1
1996 Fedder GK, Howe RT. Multimode digital control of a suspended polysilicon microstructure Journal of Microelectromechanical Systems. 5: 283-297. DOI: 10.1109/84.546408  1
1996 Fedder GK, Santhanam S, Reed ML, Eagle SC, Guillou DF, Lu MSC, Carley LR. Laminated high-aspect-ratio microstructures in a conventional CMOS process Sensors and Actuators, a: Physical. 57: 103-110. DOI: 10.1016/S0924-4247(97)80100-8  1
1994 Bustillo JM, Fedder GK, Nguyen CTC, Howe RT. Process technology for the modular integration of CMOS and polysilicon microstructures Microsystem Technologies. 1: 30-41. DOI: 10.1007/BF01367758  1
1992 Fedder GK, Chang JC, Howe RT. Thermal assembly of polysilicon microactuators with narrow-gap electrostatic comb drive Technical Digest- Ieee Solid-State Sensor and Actuator Workshop. 63-68.  1
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