Year |
Citation |
Score |
2010 |
Gu X, Bates C, Cho Y, Costner E, Marzuka F, Nagai T, Ogata T, Shi C, Sundaresan AK, Turro NJ, Bristol R, Zimmerman P, Willson CG. A new materials-based pitch division technique Journal of Photopolymer Science and Technology. 22: 773-781. DOI: 10.2494/Photopolymer.22.773 |
0.593 |
|
2009 |
Costner EA, Long BK, Navar C, Jockusch S, Lei X, Zimmerman P, Campion A, Turro NJ, Willson CG. Fundamental optical properties of linear and cyclic alkanes: VUV absorbance and index of refraction. The Journal of Physical Chemistry. A. 113: 9337-47. PMID 19630422 DOI: 10.1021/Jp903435C |
0.495 |
|
2009 |
Costner EA, Lin MW, Jen WL, Willson CG. Nanoimprint lithography materials development for semiconductor device fabrication Annual Review of Materials Research. 39: 155-180. DOI: 10.1146/Annurev-Matsci-082908-145336 |
0.501 |
|
2009 |
Meiring JE, Lee S, Costner EA, Schmid MJ, Michaelson TB, Willson CG, Grayson SM. Pattern recognition of shape-encoded hydrogel biosensor arrays Optical Engineering. 48. DOI: 10.1117/1.3099722 |
0.382 |
|
2008 |
Costner EA, Matsumoto K, Long BK, Taylor JC, Wojtczak W, Willson CG. New high index fluids: exploiting anomalous dispersion for immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6923. DOI: 10.1117/12.772979 |
0.533 |
|
2008 |
Taylor JC, Costner EA, Goh S, Wojtczak W, Dewulf D, Willson CG. The effect of added salts on the optical properties of water for high index immersion lithography fluids Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26: 506-513. DOI: 10.1116/1.2839863 |
0.524 |
|
2008 |
Matsumoto K, Costner EA, Nishimura I, Ueda M, Willson CG. High index resist for 193 nm immersion lithography Macromolecules. 41: 5674-5680. DOI: 10.1021/ma800295s |
0.456 |
|
2008 |
Matsumoto K, Costner E, Nishimura I, Ueda M, Willson CG. High index resists for 193 nm immersion lithography Proceedings of Spie - the International Society For Optical Engineering. 6923. DOI: 10.1021/Ma800295S |
0.537 |
|
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