John Hoang, Ph.D.

Affiliations: 
2011 University of California, Los Angeles, Los Angeles, CA 
Area:
Chemical Engineering, Nanoscience, Materials Science Engineering
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Jane P. Chang grad student 2011 UCLA
 (Sequential Radical Enhanced Atomic Layer Deposition of Nanostructured Yttrium Oxide Thin Films with Spatially Controlled Yttrium (III) and Erbium (III) Co-doping for Optical Applications.)
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Publications

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Shen M, Zhou B, Zhou Y, et al. (2015) A New Etch Planarization Technology to Correct Non-Uniformity Post Chemical Mechanical Polishing Ieee Transactions On Semiconductor Manufacturing. 28: 502-507
Sperling BA, Hoang J, Kimes WA, et al. (2014) Time-resolved surface infrared spectroscopy during atomic layer deposition of TiO2 using tetrakis(dimethylamido)titanium and water Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32
Hsu CC, Marchack N, Martin RM, et al. (2013) Feature profile evolution during shallow trench isolation etching in chlorine-based plasmas. III. the effect of oxygen addition Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 31
Hoang J, Schwartz RN, Wang KL, et al. (2012) The effects of energy transfer on the Er 3+ 1.54 μm luminescence in nanostructured Y 2O 3 thin films with heterogeneously distributed Yb 3+ and Er 3+ codopants Journal of Applied Physics. 112
Hoang J, Schwartz RN, Wang KL, et al. (2012) Er 3+ interlayer energy migration as the limiting photoluminescence quenching factor in nanostructured Er 3+:Y 2O 3 thin films Journal of Applied Physics. 112
Hsu CC, Hoang J, Le V, et al. (2008) Feature profile evolution during shallow trench isolation etch in chlorine-based plasmas. II. Coupling reactor and feature scale models Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26: 1919-1925
Hoang J, Hsu CC, Chang JP. (2008) Feature profile evolution during shallow trench isolation etch in chlorine-based plasmas. I. Feature scale modeling Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26: 1911-1918
Hoang J, Chang JP. (2008) Effect of Yb 3+ Co-doping on the luminescent properties of Er 3+ :Y 2O 3Thin films Aiche Annual Meeting, Conference Proceedings
Hoang J, Chang JP. (2008) Simulation of profile evolution in shallow trench formation by plasma etching Aiche Annual Meeting, Conference Proceedings
Hoang J, Van TT, Sawkar-Mathur M, et al. (2007) Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition Journal of Applied Physics. 101
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