Christopher A. Bode, Ph.D.

Affiliations: 
2001 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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Parents

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Thomas F Edgar grad student 2001 UT Austin
 (Run -to -run control of overlay and linewidth in semiconductor manufacturing.)
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Publications

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Bode CA, Wang J, He QP, et al. (2007) Run-to-run control and state estimation in high-mix semiconductor manufacturing Annual Reviews in Control. 31: 241-253
Bode CA, Ko BS, Edgar TF. (2002) Run-to-run control and performance monitoring of overlay in semiconductor manufacturing Ifac Proceedings Volumes (Ifac-Papersonline). 15: 393-398
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