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BETA: Related publications
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|Bode CA, Wang J, He QP, et al. (2007) Run-to-run control and state estimation in high-mix semiconductor manufacturing Annual Reviews in Control. 31: 241-253|
|Bode CA, Ko BS, Edgar TF. (2002) Run-to-run control and performance monitoring of overlay in semiconductor manufacturing Ifac Proceedings Volumes (Ifac-Papersonline). 15: 393-398|