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Richard S. Muller - Publications

Affiliations: 
University of California, Berkeley, Berkeley, CA, United States 
Area:
Integrated Circuits (INC)
Website:
http://www.eecs.berkeley.edu/Faculty/Homepages/muller.html
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68 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2019 Han S, Seok TJ, Kim CK, Muller RS, Wu MC. Multicast silicon photonic MEMS switches with gap-adjustable directional couplers. Optics Express. 27: 17561-17570. PMID 31252713 DOI: 10.1364/Oe.27.017561  0.301
2017 Hwang HY, Lee JS, Seok TJ, Forencich A, Grant HR, Knutson D, Quack N, Han S, Muller RS, Papen GC, Wu MC, O'Brien P. Flip Chip Packaging of Digital Silicon Photonics MEMS Switch for Cloud Computing and Data Centre Ieee Photonics Journal. 9: 1-10. DOI: 10.1109/Jphot.2017.2704097  0.359
2007 Choo H, Garmire D, Demmel J, Muller RS. Simple fabrication process for self-aligned, high-performance microscanners - Demonstrated use to generate a 2-D ablation pattern Journal of Microelectromechanical Systems. 16: 260-268. DOI: 10.1109/Jmems.2007.895048  0.592
2006 Choo H, Muller RS. Addressable microlens array to improve dynamic range of Shack - Hartmann sensors Journal of Microelectromechanical Systems. 15: 1555-1567. DOI: 10.1109/Jmems.2006.886011  0.542
2006 Kim J, Choo H, Lin L, Muller RS. Microfabricated torsional actuators using self-aligned plastic deformation of silicon Journal of Microelectromechanical Systems. 15: 553-562. DOI: 10.1109/Jmems.2006.876789  0.59
2003 Krulevitch PA, Bierden PA, Bifano T, Carr E, Dimas CE, Dyson H, Helmbrecht MA, Kurczynski P, Muller RS, Olivier SS, Peter Y, Sadoulet B, Solgaard O, Yang E. MOEMS spatial light modulator development at the Center for Adaptive Optics Proceedings of Spie. 4983: 172-179. DOI: 10.1117/12.478562  0.695
2003 Riehl PS, Scott KL, Muller RS, Howe RT, Yasaitis JA. Electrostatic charge and field sensors based on micromechanical resonators Journal of Microelectromechanical Systems. 12: 577-589. DOI: 10.1109/Jmems.2003.818066  0.761
2002 Srinivasan U, Helmbrecht MA, Muller RS, Howe RT. MEMS: Some Self-Assembly Required Optics and Photonics News. 13: 20. DOI: 10.1364/Opn.13.11.000020  0.754
2002 Rembe C, Muller RS. Measurement system for full three-dimensional motion characterization of MEMS Journal of Microelectromechanical Systems. 11: 479-488. DOI: 10.1109/Jmems.2002.803285  0.343
2002 Srinivasan U, Helmbrecht MA, Rembe C, Muller RS, Howe RT. Fluidic self-assembly of micromirrors onto microactuators using capillary forces Ieee Journal On Selected Topics in Quantum Electronics. 8: 4-11. DOI: 10.1109/2944.991393  0.759
2002 Srinivasan U, Helmbrecht MA, Muller RS, Howe RT. MEMS: Some self-assembly required Optics and Photonics News. 13: 20-22+56.  0.732
2001 Rembe C, Caton P, White RM, Muller RS. Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers Proceedings of Spie - the International Society For Optical Engineering. 4558: 108-116. DOI: 10.1117/12.442992  0.486
2000 Hart MR, Conant RA, Lau KY, Muller RS. Stroboscopic interferometer system for dynamic MEMS characterization Journal of Microelectromechanical Systems. 9: 409-418. DOI: 10.1109/84.896761  0.742
2000 Conant RA, Hagelin PM, Krishnamoorthy U, Hart M, Solgaard O, Lau KY, Muller RS. Raster-scanning full-motion video display using polysilicon micromachined mirrors Sensors and Actuators, a: Physical. 83: 291-296. DOI: 10.1016/S0924-4247(00)00347-2  0.734
1998 Friedberger A, Muller RS. Improved surface-micromachined hinges for fold-out structures Ieee\/Asme Journal of Microelectromechanical Systems. 7: 315-319. DOI: 10.1109/84.709650  0.352
1998 Kiang MH, Solgaard O, Lau KY, Muller RS. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning Journal of Microelectromechanical Systems. 7: 27-37. DOI: 10.1109/84.661381  0.375
1998 Kiang M, Solgaard O, Lau KY, Muller RS. Polysilicon optical microscanners for laser scanning displays Sensors and Actuators a: Physical. 70: 195-199. DOI: 10.1016/S0924-4247(98)00133-2  0.359
1997 Kiang M, Nee JT, Lau KY, Muller RS. Surface-micromachined diffraction gratings for scanning spectroscopic applications Sensors. 1: 343-345. DOI: 10.1109/Sensor.1997.613654  0.351
1997 Kiang M, Francis DA, Chang-Hasnain CJ, Solgard O, Lau KY, Muller RS. Actuated polysilicon micromirrors for raster-scanning displays Sensors. 1: 323-326. DOI: 10.1109/Sensor.1997.613649  0.371
1997 Judy JW, Muller RS. Magnetically actuated, addressable microstructures Journal of Microelectromechanical Systems. 6: 249-255. DOI: 10.1109/84.623114  0.603
1996 Lau KY, Solgaard O, Tien N, Daneman M, Kiang M, Muller RS. Silicon Micromachined Microphotonics The Japan Society of Applied Physics. 1996: 637-639. DOI: 10.7567/Ssdm.1996.D-4-1  0.304
1996 Williams KR, Muller RS. Etch rates for micromachining processing Journal of Microelectromechanical Systems. 5: 256-269. DOI: 10.1109/84.546406  0.303
1996 Kiang MH, Solgaard O, Muller RS, Lau KY. Micromachined polysilicon microscanners for barcode readers Ieee Photonics Technology Letters. 8: 1707-1709. DOI: 10.1109/68.544726  0.372
1996 Kiang MH, Solgaard O, Muller RS, Lau KY. Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers Ieee Photonics Technology Letters. 8: 95-97. DOI: 10.1109/68.475790  0.306
1996 Tien N, Solgaard O, Kiang M, Daneman M, Lau K, Muller R. Surface-micromachined mirrors for laser-beam positioning Sensors and Actuators a: Physical. 52: 76-80. DOI: 10.1016/0924-4247(96)80128-2  0.325
1996 Judy JW, Muller RS. Magnetic microactuation of torsional polysilicon structures Sensors and Actuators a-Physical. 53: 392-397. DOI: 10.1016/0924-4247(96)01138-7  0.576
1995 Judy JW, Muller RS, Zappe HH. Magnetic Microactuation of Polysilicon Flexure Structures Journal of Microelectromechanical Systems. 4: 162-169. DOI: 10.1109/84.475542  0.616
1995 Solgaard O, Daneman M, Tien NC, Friedberger A, Muller RS, Lau KY. Optoelectronic Packaging Using Silicon Surface-Micromachined Alignment Mirrors Ieee Photonics Technology Letters. 7: 41-43. DOI: 10.1109/68.363382  0.353
1994 Anderson RC, Muller RS, Tobias CW. Porous Polycrystalline Silicon: A New Material for MEMS Journal of Microelectromechanical Systems. 3: 10-18. DOI: 10.1109/84.285719  0.336
1993 Ried RP, Kim ES, Hong DM, Muller RS. Piezoelectric microphone with on-chip CMOS circuits Ieee\/Asme Journal of Microelectromechanical Systems. 2: 111-120. DOI: 10.1109/84.260255  0.365
1992 Kim C-, Pisano AP, Muller RS. Silicon-processed overhanging microgripper Ieee\/Asme Journal of Microelectromechanical Systems. 1: 31-36. DOI: 10.1109/84.128053  0.583
1992 Mastrangelo CH, Yeh JHJ, Muller RS. Electrical And Optical Characteristics Of Vacuum-Sealed Polysilicon Microlamps Ieee Transactions On Electron Devices. 39: 1363-1375. DOI: 10.1109/16.137316  0.359
1991 Mastrangelo CH, Muller RS, Kumar S. Microfabricated incandescent lamps. Applied Optics. 30: 868-73. PMID 20582072 DOI: 10.1364/Ao.30.000868  0.324
1991 Mastrangelo CH, Muller RS. Microfabricated Thermal Absolute-Pressure Sensor with On-Chip Digital Front-End Processor Ieee Journal of Solid-State Circuits. 26: 1998-2007. DOI: 10.1109/4.104194  0.313
1990 Howe RT, Muller RS, Gabriel KJ, Trimmer WSN. Silicon micromechanics: sensors and actuators on a chip Ieee Spectrum. 27: 29-35. DOI: 10.1109/6.58424  0.576
1990 Muller RS, Howe RT. Technologies for microdynamic devices Nanotechnology. 1: 8-12. DOI: 10.1088/0957-4484/1/1/002  0.564
1990 Field LA, Muller RS. Fusing silicon wafers with low melting temperature glass Sensors and Actuators: a. Physical. 23: 935-938. DOI: 10.1016/0924-4247(90)87063-O  0.312
1990 Fan L, Howe R, Muller R. Fracture toughness characterization of brittle thin films Sensors and Actuators a: Physical. 23: 872-874. DOI: 10.1016/0924-4247(90)87049-O  0.48
1990 Udell KS, Pisano AP, Howe RT, Muller RS, White RM. Microsensors for heat transfer and fluid flow measurements Experimental Thermal and Fluid Science. 3: 52-59. DOI: 10.1016/0894-1777(90)90100-L  0.622
1989 Calahorra Z, Minami E, White RM, Muller RS. Reactive ion etching of indium-tin-oxide films Journal of the Electrochemical Society. 136: 1839-1840. DOI: 10.1149/1.2097042  0.497
1989 Tai YC, Muller RS. Integrated stylus-force gauge Sensors and Actuators: a. Physical. 22: 410-413. DOI: 10.1016/0924-4247(89)80004-4  0.507
1989 Tai YC, Muller RS. IC-processed electrostatic synchronous micromotors Sensors and Actuators. 20: 49-55. DOI: 10.1016/0250-6874(89)87101-X  0.505
1989 Fan L, Tai Y, Muller RS. IC-processed electrostatic micromotors Sensors and Actuators. 20: 41-47. DOI: 10.1016/0250-6874(89)87100-8  0.507
1988 Fan L-, Tai Y-, Muller RS. Integrated movable micromechanical structures for sensors and actuators Ieee Transactions On Electron Devices. 35: 724-730. DOI: 10.1109/16.2523  0.38
1988 Tai YC, Mastrangelo CH, Muller RS. Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films Journal of Applied Physics. 63: 1442-1447. DOI: 10.1063/1.339924  0.312
1988 Tai YC, Muller RS. Lightly-doped polysilicon bridge as a flow meter Sensors and Actuators. 15: 63-75. DOI: 10.1016/0250-6874(88)85018-2  0.476
1987 Kim ES, Muller RS. IC-Processed piezoelectric microphone Ieee Electron Device Letters. 8: 467-468. DOI: 10.1109/Edl.1987.26696  0.353
1986 Howe RT, Muller RS. Resonant-microbridge vapor sensor Ieee Transactions On Electron Devices. 33: 499-506. DOI: 10.1109/T-Ed.1986.22519  0.543
1986 Polla DL, Muller RS, White RM. Integrated multisensor chip Ieee Electron Device Letters. 7: 254-256. DOI: 10.1109/Edl.1986.26363  0.52
1985 Comer AE, Muller RS. An integrated piezoelectric-insulator DMOST surface-acoustic-wave convolver Solid-State Electronics. 28: 1117-1126. DOI: 10.1016/0038-1101(85)90193-5  0.358
1984 Goicolea JI, Muller RS, Smith JE. Highly sensitive silicon carrier-domain magnetometer Sensors and Actuators. 5: 147-167. DOI: 10.1016/0250-6874(84)80005-0  0.336
1984 Chen PL, Muller RS, Andrews AP. Integrated silicon pi-fet accelerometer with proof mass Sensors and Actuators. 5: 119-126. DOI: 10.1016/0250-6874(84)80002-5  0.345
1983 Howe RT, Muller RS. Stress in polycrystalline and amorphous silicon thin films Journal of Applied Physics. 54: 4674-4675. DOI: 10.1063/1.332628  0.517
1983 Howe R, Muller R. Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties Sensors and Actuators. 4: 447-454. DOI: 10.1016/0250-6874(83)85056-2  0.532
1983 Muller RS. Heat and strain-sensitive thin-film transducers Sensors and Actuators. 4: 173-182. DOI: 10.1016/0250-6874(83)85022-7  0.318
1982 Chen P, Muller RS, Jolly RD, Halac GL, White RM, Andrews AP, Lim TC, Motamedi ME. Integrated silicon microbeam PI-FET accelerometer Ieee Transactions On Electron Devices. 29: 27-33. DOI: 10.1109/T-Ed.1982.20654  0.526
1982 Comer AE, Muller RS. A new ZnO-on-Si convolver structure Ieee Electron Device Letters. 3: 118-120. DOI: 10.1109/Edl.1982.25505  0.363
1980 Jolly RD, Muller RS. Miniature Cantilever Beams Fabricated by Anisotropic Etching of Silicon Journal of the Electrochemical Society. 127: 2750-2754. DOI: 10.1149/1.2129585  0.321
1980 Coen RW, Muller RS. Velocity of surface carriers in inversion layers on silicon Solid-State Electronics. 23: 35-40. DOI: 10.1016/0038-1101(80)90165-3  0.304
1979 Kwan S, Chuang CT, Muller RS, White RM. Dual-gate depletion-mode DMOS transistor for linear gain-control application Ieee Transactions On Electron Devices. 26: 1053-1058. DOI: 10.1109/T-Ed.1979.19544  0.509
1977 Yeh KW, Muller RS, Kwan SH. Detection of Acoustic Waves with a PI-DMOS Transducer Japanese Journal of Applied Physics. 16: 517. DOI: 10.7567/Jjaps.16S1.517  0.312
1977 Amantea R, Muller RS. Studies of Localized Charge Injection in Surface Avalanched pn Junctions Japanese Journal of Applied Physics. 16: 205. DOI: 10.7567/Jjaps.16S1.205  0.318
1975 Greeneich EW, Muller RS. Theoretical transducer properties of piezoelectric insulator FET transducers Journal of Applied Physics. 46: 4631-4640. DOI: 10.1063/1.321539  0.307
1972 Gosney WM, Muller RS. Aluminum oxide films made from evaporated sapphire Thin Solid Films. 14: 255-266. DOI: 10.1016/0040-6090(72)90427-0  0.313
1971 Hu C, Muller RS. A resistive-gated IGFET tetrode Ieee Transactions On Electron Devices. 18: 418-425. DOI: 10.1109/T-Ed.1971.17218  0.338
1967 Fiebiger JR, Muller RS. Electrical Performance of Metal‐Insulator‐Piezoelectric Semiconductor Transducers Journal of Applied Physics. 38: 1948-1955. DOI: 10.1063/1.1709788  0.319
1967 Kamins TI, Muller RS. Statistical considerations in MOSFET calculations Solid-State Electronics. 10: 423-431. DOI: 10.1016/0038-1101(67)90040-8  0.308
1965 Muller RS, Conragan Y. A metal-insulator-piezoelectric semiconductor electromechanical transducer Ieee Transactions On Electron Devices. 12: 590-595. DOI: 10.1109/T-Ed.1965.15614  0.349
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