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Mihirkant Upadhyaya, Ph.D. - Publications

Affiliations: 
2014 Nanoscale Science and Engineering-Nanoscale Engineering State University of New York, Albany, Albany, NY, United States 
Area:
Optics Physics, Nanoscience, Materials Science Engineering
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2 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2014 Upadhyaya M, Kandel Y, Denbeaux G, Montgomery C, Fan YJ. X-ray photoelectron spectroscopy process optimization for characterization of trace contamination elements for extreme ultraviolet resist outgassing study X-Ray Spectrometry. 43: 102-107. DOI: 10.1002/Xrs.2522  0.49
2013 Upadhyaya M, Kandel Y, Denbeaux G, Montgomery C, Fan YJ. Optimizing XPS tool performance for characterizing trace contamination elements for EUV resist outgas testing Proceedings of Spie - the International Society For Optical Engineering. 8679. DOI: 10.1117/12.2018629  0.489
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