Year |
Citation |
Score |
2008 |
Stemmer S, Agustin MP, Klenov DO. Scanning transmission electron microscopy studies of interface stability and point defects in gate stacks with high-k dielectrics Ecs Transactions. 16: 177-183. DOI: 10.1149/1.2981600 |
0.587 |
|
2006 |
Agustin MP, Alshareef H, Quevedo-Lopez MA, Stemmer S. Influence of AIN layers on the interface stability of HfO 2 gate dielectric stacks Applied Physics Letters. 89. DOI: 10.1063/1.2236264 |
0.602 |
|
2006 |
Edge LF, Schlom DG, Rivillon S, Chabal YJ, Agustin MP, Stemmer S, Lee T, Kim MJ, Craft HS, Maria JP, Hawley ME, Holländer B, Schubert J, Eisenbeiser K. Thermal stability of amorphous LaScO 3 films on silicon Applied Physics Letters. 89. DOI: 10.1063/1.2222302 |
0.598 |
|
2006 |
Agustin MP, Bersuker G, Foran B, Boatner LA, Stemmer S. Scanning transmission electron microscopy investigations of interfacial layers in HfO 2 gate stacks Journal of Applied Physics. 100. DOI: 10.1063/1.2214187 |
0.666 |
|
2006 |
McCarthy I, Agustin MP, Shamuilia S, Stemmer S, Afanas'ev VV, Campbell SA. Strontium hafnate films deposited by physical vapor deposition Thin Solid Films. 515: 2527-2530. DOI: 10.1016/J.Tsf.2006.07.030 |
0.563 |
|
2005 |
Agustin MP, Fonseca LRC, Hooker JC, Stemmer S. Scanning transmission electron microscopy of gate stacks with HfO 2 dielectrics and TiN electrodes Applied Physics Letters. 87: 1-3. DOI: 10.1063/1.2053362 |
0.649 |
|
2005 |
Li M, Zhang Z, Campbell SA, Gladfelter WL, Agustin MP, Klenov DO, Stemmer S. Electrical and material characterizations of high-permittivity Hf x Ti 1-x O 2 gate insulators Journal of Applied Physics. 98. DOI: 10.1063/1.2039268 |
0.593 |
|
2005 |
Lichtenwalner DJ, Jur JS, Kingon AI, Agustin MP, Yang Y, Stemmer S, Goncharova LV, Gustafsson T, Garfunkel E. Lanthanum silicate gate dielectric stacks with subnanometer equivalent oxide thickness utilizing an interfacial silica consumption reaction Journal of Applied Physics. 98. DOI: 10.1063/1.1988967 |
0.622 |
|
2005 |
Agustin MP, Fonseca LRC, Hooker JH, Stemmer S. HAADF Imaging and Low-Loss EELS Investigation of HfO2/TiN Interfaces in High-k Gate Stacks Microscopy and Microanalysis. 11: 1446-1447. DOI: 10.1017/S1431927605504458 |
0.519 |
|
2005 |
Foran B, Barnett J, Lysaght PS, Agustin MP, Stemmer S. Characterization of advanced gate stacks for Si CMOS by electron energy-loss spectroscopy in scanning transmission electron microscopy Journal of Electron Spectroscopy and Related Phenomena. 143: 149-158. DOI: 10.1016/J.Elspec.2004.03.013 |
0.666 |
|
2004 |
Agustin MP, Foran B, Bersuker G, Barnett J, Stemmer S. Characterization of ultra-thin Hf-based alternative dielectric layers for Si CMOS by Z-contrast imaging and electron energy-loss spectroscopy in STEM Microscopy and Microanalysis. 10: 322-323. DOI: 10.1017/S1431927604886525 |
0.618 |
|
2004 |
Stemmer S, Agustin MP, Yang Y, Schmidt S, Foran B, Bersuker G, Schlom DG. Advanced characterization of novel gate stacks for Si CMOS by scanning transmission electron microscopy Microscopy and Microanalysis. 10: 290-291. DOI: 10.1017/S1431927604886343 |
0.577 |
|
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