Year |
Citation |
Score |
2012 |
Blanchard PT, Bertness KA, Harvey TE, Sanders AW, Sanford NA, George SM, Seghete D. MOSFETs made from GaN nanowires with fully conformal cylindrical gates Ieee Transactions On Nanotechnology. 11: 479-482. DOI: 10.1109/Tnano.2011.2177993 |
0.49 |
|
2012 |
George SM, Yoon B, Hall RA, Abdulagatov AI, Gibbs ZM, Lee Y, Seghete D, Lee BH. Molecular Layer Deposition of Hybrid Organic-Inorganic Films Atomic Layer Deposition of Nanostructured Materials. 83-107. DOI: 10.1002/9783527639915.ch5 |
0.523 |
|
2011 |
Baker L, Cavanagh AS, Seghete D, George SM, MacKus AJM, Kessels WMM, Liu ZY, Wagner FT. Nucleation and growth of Pt atomic layer deposition on Al2O 3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma Journal of Applied Physics. 109. DOI: 10.1063/1.3555091 |
0.725 |
|
2011 |
Seghete D, Rayner GB, Cavanagh AS, Anderson VR, George SM. Molybdenum atomic layer deposition using MoF6 and Si 2H6 as the reactants Chemistry of Materials. 23: 1668-1678. DOI: 10.1021/Cm101673U |
0.737 |
|
2011 |
Seghete D, Fabreguette FH, George SM. Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers Thin Solid Films. 519: 3612-3618. DOI: 10.1016/J.Tsf.2011.01.285 |
0.643 |
|
2011 |
Zhang Y, Seghete D, Abdulagatov A, Gibbs Z, Cavanagh A, Yang R, George S, Lee Y. Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition Surface and Coatings Technology. 205: 3334-3339. DOI: 10.1016/J.Surfcoat.2010.12.001 |
0.755 |
|
2011 |
Montague JR, Dalberth M, Gray JM, Seghete D, Bertness KA, George SM, Bright VM, Rogers CT, Sanford NA. Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films Sensors and Actuators, a: Physical. 165: 59-65. DOI: 10.1016/J.Sna.2010.03.014 |
0.638 |
|
2011 |
Davidson BD, Seghete D, George SM, Bright VM. ALD tungsten NEMS switches and tunneling devices Sensors and Actuators, a: Physical. 166: 269-276. DOI: 10.1016/J.Sna.2009.07.022 |
0.434 |
|
2010 |
Seghete D, Hall RA, Yoon B, George SM. Importance of trimethylaluminum diffusion in three-step ABC molecular layer deposition using trimethylaluminum, ethanolamine, and maleic anhydride. Langmuir : the Acs Journal of Surfaces and Colloids. 26: 19045-51. PMID 21117634 DOI: 10.1021/La102649X |
0.665 |
|
2009 |
Lee M, Cheng JH, Bertness K, Sanford N, Seghete D, George S, Lee YC. Atomic layer deposition enabled interconnect technology for vertical nanowire array devices Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2054-2057. DOI: 10.1109/Sensor.2009.5285638 |
0.56 |
|
2009 |
Miller DC, Foster RR, Zhang Y, Jen SH, Bertrand JA, Lu Z, Seghete D, O'Patchen JL, Yang R, Lee YC, George SM, Dunn ML. The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates Journal of Applied Physics. 105. DOI: 10.1063/1.3124642 |
0.774 |
|
2009 |
Yoon B, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic - Inorganic alucone polymer films using a three-step abc reaction sequence Chemistry of Materials. 21: 5365-5374. DOI: 10.1021/Cm9013267 |
0.806 |
|
2009 |
Seghete D, Davidson BD, Hall RA, Chang YJ, Bright VM, George SM. Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition Sensors and Actuators, a: Physical. 155: 8-15. DOI: 10.1016/J.Sna.2008.12.016 |
0.67 |
|
2009 |
Chang YJ, Gray JM, Imtiaz A, Seghete D, Mitch Wallis T, George SM, Kabos P, Rogers CT, Bright VM. Micromachined resonators of high Q-factor based on atomic layer deposited alumina Sensors and Actuators, a: Physical. 154: 229-237. DOI: 10.1016/J.Sna.2008.11.015 |
0.51 |
|
2009 |
Miller DC, Foster RR, Jen SH, Bertrand JA, Seghete D, Yoon B, Lee YC, George SM, Dunn ML. Thermomechanical properties of aluminum alkoxide (alucone) films created using molecular layer deposition Acta Materialia. 57: 5083-5092. DOI: 10.1016/J.Actamat.2009.07.015 |
0.776 |
|
2009 |
Yoon B, O'Patchen JL, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic-inorganic polymer films using diethylzinc and ethylene glycol Chemical Vapor Deposition. 15: 112-121. DOI: 10.1002/Cvde.200806756 |
0.797 |
|
2008 |
Dameron AA, Seghete D, Burton BB, Davidson SD, Cavanagh AS, Bertrand JA, George SM. Molecular layer deposition of alucone polymer films using trimethylaluminum and ethylene glycol Chemistry of Materials. 20: 3315-3326. DOI: 10.1021/Cm7032977 |
0.646 |
|
Show low-probability matches. |