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Matthew J. Partlow, Ph.D.

Affiliations: 
2004 Stony Brook University, Stony Brook, NY, United States 
Area:
Atomic physics; level crossing techniques.
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Parents

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Harold J. Metcalf grad student 2004 SUNY Stony Brook
 (Bichromatic collimation to make an intense helium beam.)
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Publications

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Horne SF, Partlow MJ, Gustafson DS, et al. (2012) High brightness Electrodeless Z-pinchâ„¢ EUV source for mask inspection tools Proceedings of Spie - the International Society For Optical Engineering. 8322
Partlow MJ, Besen MM, Blackborow PA, et al. (2012) Extreme-ultraviolet light source development to enable pre-production mask inspection Journal of Micro-Nanolithography Mems and Moems. 11
Smith D, Partlow M, Horne S. (2011) Inductively Driven, Electrodeless Z-Pinch Sources for EUV and Soft X-Ray Applications Frontiers in Optics
Gustafson D, Horne SF, Partlow MJ, et al. (2011) EQ-10 Electrodeless Z-pinch EUV source for metrology applications Proceedings of Spie - the International Society For Optical Engineering. 8166
Horne SF, Gustafson D, Partlow MJ, et al. (2011) Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications Proceedings of Spie - the International Society For Optical Engineering. 7969
Horne S, Smith D, Besen M, et al. (2010) A novel high-brightness, broadband light-source technology from the VUV to the IR Proceedings of Spie - the International Society For Optical Engineering. 7680
Blackborow PA, Partlow MJ, Horne SF, et al. (2010) EUV source development for AIMS and blank inspection Proceedings of Spie - the International Society For Optical Engineering. 7636
Horne SF, Niell FM, Partlow MJ, et al. (2009) Development of a high pulse rate EUV source Proceedings of Spie - the International Society For Optical Engineering. 7271
Blackborow PA, Partlow MJ, Horne SF, et al. (2008) EUV source development at Energetiq Proceedings of Spie - the International Society For Optical Engineering. 6921
Partlow M, Miao X, Bochmann J, et al. (2004) Bichromatic slowing and collimation to make an intense helium beam. Physical Review Letters. 93: 213004
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