Benjamin P. Shieh, Ph.D. - Publications
Affiliations: | 2002 | Stanford University, Palo Alto, CA |
Year | Citation | Score | |||
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2002 | Shieh BP, Deal MD, Saraswat KC, Choudhury R, Park CW, Sukharev V, Loh W, Wright P. Electromigration reliability of low capacitance air-gap interconnect structures Proceedings of the Ieee 2002 International Interconnect Technology Conference, Iitc 2002. 203-205. DOI: 10.1109/IITC.2002.1014934 | 0.396 | |||
2001 | Sukharev V, Shieh BP, Choudhury R, Park C, Saraswat KC. Reliability studies on multilevel interconnection with intermetal dielectric air gaps Microelectronics Reliability. 41: 1631-1635. DOI: 10.1016/S0026-2714(01)00153-6 | 0.397 | |||
1997 | Bassman LC, Vinci RP, Shieh BP, Kim DK, McVittie JP, Saraswat KC, Deal MD. Simulation of the effect of dielectric air gaps on interconnect reliability Materials Research Society Symposium - Proceedings. 473: 323-328. | 0.596 | |||
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