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Ara Philipossian

Affiliations: 
Chemical Engineering University of Arizona, Tucson, AZ 
Area:
Chemical Engineering, Materials Science Engineering, Environmental Engineering
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"Ara Philipossian"
Cross-listing: Envirotree

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Children

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Zhonglin Li grad student 2005 University of Arizona
Jamshid Sorooshian grad student 2005 University of Arizona
Darren A. DeNardis grad student 2006 University of Arizona
Daniel Rosales-Yeomans grad student 2007 University of Arizona
Hyo-Sang Lee grad student 2008 University of Arizona
Yasa A. Sampurno grad student 2008 University of Arizona
Ting Sun grad student 2009 University of Arizona
Xiaomin Wei grad student 2010 University of Arizona
Anand Meled grad student 2011 University of Arizona
Yubo Jiao grad student 2012 University of Arizona
Xiaoyan Liao grad student 2014 University of Arizona

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Publications

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Mariscal JC, Dadashazar H, McAllister J, et al. (2020) Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization Japanese Journal of Applied Physics. 59
Philipossian R, Sampurno Y, Philipossian A. (2020) Determining instantaneous removal rates in metal chemical mechanical planarization Japanese Journal of Applied Physics. 59: SL0803
Mariscal JC, McAllister J, Sampurno Y, et al. (2020) Tribological, Thermal and Kinetic Characterization of SiO2 and Si3N4 Polishing for STI CMP on Blanket and Patterned Wafers Ecs Journal of Solid State Science and Technology. 9: 44008
McAllister J, Mariscal JC, Dadashazar H, et al. (2020) Effect of Abrasive Nanoparticle Concentration on the Tribological, Thermal and Kinetic Attributes of Tungsten Chemical Mechanical Planarization Ecs Journal of Solid State Science and Technology. 9: 24014
Mariscal JC, Sampurno Y, Slutz D, et al. (2020) Effect of various CVD-coated conditioning disc designs and polisher kinematics on fluid flow characteristics during CMP Ecs Journal of Solid State Science and Technology. 9: 24005
McAllister J, Stuffle C, Sampurno Y, et al. (2019) Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO Chemical Mechanical Planarization Performance. Micromachines. 10
Frank C, Headley R, Sampurno Y, et al. (2019) Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Steady-State Conditions Ecs Journal of Solid State Science and Technology. 9: 24012
Mariscal JC, McAllister J, Sampurno Y, et al. (2019) Insights into Tungsten Chemical Mechanical Planarization: Part III. Mini-Marathons and Associated Numerical Simulations Ecs Journal of Solid State Science and Technology. 8: P3190-P3194
Headley R, Frank C, Sampurno Y, et al. (2019) Correlating Coefficient of Friction and Shear Force to Platen Motor Current in Tungsten and Interlayer Dielectric Chemical Mechanical Planarization at Highly Non-Steady-State Conditions Ecs Journal of Solid State Science and Technology. 9: 44003
Mariscal JC, McAllister J, Sampurno Y, et al. (2019) Insights into tungsten chemical mechanical planarization: Part II. Effect of pad surface micro-texture on frictional, thermal and kinetic aspects of the process Ecs Journal of Solid State Science and Technology. 8: 3175
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