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Marshal Miller, Ph.D. - Publications

Affiliations: 
2010 Electrical Engineering University of California, Berkeley, Berkeley, CA, United States 
Area:
Integrated Circuits (INC); Solid-State Devices
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2 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2010 Neureuther AR, Rubinstein J, Chin E, Wang L, Miller M, Clifford C, Yamazoe K. Modeling optical lithography physics Japanese Journal of Applied Physics. 49: 06GA011-06GA017. DOI: 10.1143/Jjap.49.06Ga01  0.473
2007 Neureuther A, Poppe W, Holwill J, Chin E, Wang L, Yang JS, Miller M, Ceperley D, Clifford C, Kikuchi K, Choi J, Dornfeld D, Friedberg P, Spanos C, Hoang J, et al. Collaborative platform, tool-kit, and physical models for DfM Proceedings of Spie - the International Society For Optical Engineering. 6521. DOI: 10.1117/12.721199  0.438
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